Semiconductor Materials and Device Physics
Physik der Halbleitermaterialien und -bauteile
6 CPirregularlyENno longer offered
Prerequisites
Recommended, as written
Knowledge of solid state physics and chemistry based on a Bachelor study course in physics.
Contents
• Silicon wafer manufacturing (crystal growth, epitaxy processes etc.) • Si cleanroom processing (implantation, etching, lithography etc.) • Transistors (e.g. Field effect transistors, Heterobipolar transistors etc.) • Memories (e.g. Flash, DRAM, RRAM etc.) • Photonics (e.g.LEDs, lasers, photodetectors, modulators etc.) • Sensors (e.g. optical sensors, surface acoustic wave filters etc.) • Photovoltaics (e.g. concentrator photovoltaics, thin film photovoltaics etc.)
Learning outcomes
Goal of the lectures is to give students a solid background in semiconductor physics to enable them to understand the principles of important microelectronic devices which set the basis of electronic equipment used by everybody in daily life applications. Besides semiconductor physics and device fabrication, this includes lectures on transistors, memories, photonics, photovoltaics, solid state lighting, sensors etc.
Assessment
Prerequisite: • Written homework with final presentation of results Final module examination: • Oral examination, 30-45 min.
Literature (1)
- Physics of Semiconductor Devices, S.M. Sze and Kwok K. NG, Wiley 2007.
Remarks
• Study programme Physics M. Sc.: Compulsory elective module in complex „Experimental/Applied Physics“.
Source: BTU's module description · retrieved 16 Oct 2026Original