Modules

Prerequisites

Contents

• Introduction to silicon technology: materials, film deposition and structuring, surface- and volume-micromechanics, overview of equipment technology. • Physical principles of efficiency: basic physical principles of efficiency of simple sensors and actors (e.g. electrostatic, piezoelectric and magnetic effects). • Proposal of complex sensors and actors: overview of systematics and methodology, simple simulation examples for the calculation of dynamic properties of MEMS sensors. • Function and properties of complex sensors and actors: e.g. light modulators, acceleration sensors, gyroscope, scanner mirror.

Learning outcomes

After successful completion of the module, the students master the basics of silicon-based microsystems technology. Using the module's topic as an example, they understand the methods of gaining knowledge and know exemplary applications. In addition, social competences such as the ability to cooperate, as well as other individual competences such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students.

Assessment

• Written examination, 90 minutes

Remarks

• Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“ • Study programme Micro- and Nanoelectronics M.Sc.: Compulsory elective module in complex „Technology and Devices“ Self-organized studies are composed of: • reworking of lecture • literature work • preparation of a talk