Modules

Prerequisites

Contents

Ray optical and wave optical description of optical systems including introduction to Fourier-Optics to describe the performance of optical metrology systems Principle, properties and use of • Laser vibrometer • White light interferometer • Ellipsometer • Scanning Electron Microscopy • Energy Dispersive X-Ray Spectroscopy • Profilometer • Nanointendation • Lock-In amplifier

Learning outcomes

After successfully completing the module, students have acquired an adequate and structured professional and general knowledge about the field of modern laboratory techniques and metrologies and have learned how to connect various concepts of this field. Moreover, social competences like cooperation capacity and individual competencies like accuracy, perseverance, curiosity, own initiative, tolerance against frustration have been supported.

Assessment

• seminar talk, 20 minutes, with written part, 10 pages (50%) • written exam, 75 minutes (50%)

Remarks

• Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“ • Study programme Micro-and Nanoelectronics M.Sc.: Compulsory elective module in complex „Technology and Devices“