Physics and Technology of Semiconductor Devices
Physik und Technologie von Halbleiterbauelementen
4 CPSummerENno longer offered
Prerequisites
Recommended, as written
Fundamental knowledge in solid state physics corresponding to a bachelor degree in physics or electrical engineering.
Contents
The focus of the course is on advanced silicon technology and on new device concepts. The following topics are covered: • Overview on silicon fabrication techniques • Nanometer-scale CMOS devices and technologies • CMOS performance factors and device design • Active and passive devices for radio-frequency application • Performance factors and device design of bipolar transistors • Semiconductor memory concepts • Optoelectronic semiconductor devices
Learning outcomes
Students acquire basic knowledge in the physics and fabrication techniques of state-of-the-art semiconductor nano- and microelectronic devices.The topic of the module serves as an example to illustrate the connection between basic and applied science andto demonstrate the methods of attaining new perceptions. Additionally the module supports presentation skills and further competences as accurateness, endurance, and curiosity.
Assessment
Prerequisite: • Successful oral presentation in the courseFinal module examination: • Oral examination, 30-45 min.
Literature (3)
- Y. Taur, T.H. Ning, Fundamentals of modern VLSI devices, Cambridge University Press, 1998
- S.M. Sze, Physics of semiconductor devices, John Wiley & Sons, New York, 1981
- M. Quirk, J. Serda, Semiconductor Manufacturing Technology, Prentice Hall Inc., 2001
Remarks
Lecture is given by PD Dr. Holger Rücker. • Study programme Physics M. Sc.: Compulsory elective module for area "A: Applied Physics".
Source: BTU's module description · retrieved 20 Oct 2026Original