Modules

Prerequisites

Contents

• Differentiation of sensors, transducers, actuators • Classification of sensors according to operating principles and intended use • Characteristics of sensors such as linearity, hysteresis, resolution • Analogue and digital sensors From elementary sensors to signal processing • Design, mode of operation and properties of selected capacitive, optical, chemical, acoustic and ultrasonic sensors • Application areas of sensors • Signal conditioning • Current research activities in microsensor technology • Principles and examples of microactuators and microtransducers

Learning outcomes

After successful completion of the module, students have in-depth knowledge in the field of silicon-based microsystems technology, especially in the area of microsensor technology. They are able to analyze problems in this field and to develop solutions to problems, In addition, social competencies such as the ability to cooperate, as well as other individual competencies such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students.

Assessment

Prerequisite: • Successful seminar talk (with written part) Final module examination: • Written exam, 90 minutes

Remarks

• Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“ • Study programme Micro- and Nanoelectronics M.Sc.: Compulsory elective module in complex „Technology and Devices“ Self-organized studies are composed of: • reworking of lecture • literature work • preparation of a talk